Due to the increasing security and reliability demand of actual industrial process control systems, the study on fault diagnosis and fault tolerant control of dynamic systems has received considerable attention. Fault accommodation (FA) is one of effective methods that can be used to enhance system stability and reliability, so it has been widely and in-depth investigated and become a hot topic in recent years. Fault detection is used to monit...
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Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines...