Investigation of industrially-suited processes for deposition of oxide thin films by high power impulse magnetron sputtering. - Prijzen

The scope of this work is to investigate and to develop advanced HIPIMS processes for deposition of oxides, utilizing industrial-scale equipment and technology. Two classes of oxide materials were studied: insulating (aluminum oxide) and conducting oxides (indium-tin oxide and aluminum-doped zinc oxide). The electrical properties of the oxides have a significant influence on the process design, as the issues and approaches for deposition of insul...

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Investigation of industrially-suited processes for deposition of oxide thin films by high power impulse magnetron sputtering.
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